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Bibliography

Íø±¬ÃÅ CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): G�llentoft, Lina, Pettersson, Lina M E, Danielsen, Nils, Schouenborg, Jens, Prinz, Christelle N and Linsmeier, Cecilia Eriksson

Published: 2015

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Author(s): Garces, N Y and Wheeler, V D

Published: 2012

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Author(s): Molpeceres, Carlos, S�nchez-Aniorte, Mar�a Isabel, Morales, Miguel, Mu�oz, David, Mart�n, Isidro, Ortega, Pablo, Colina, M�nica, Voz, Crist�bal and Alcubilla, Ram�n

Published: 2012

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Author(s): Yeh, T C, Zhu, Q, Buchholz, D B, Martinson, A B, Chang, R P H and Mason, T O

Published: 2015

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Author(s): Jin fan, Hong, Knez, Mato, Scholz, Roland, Nielsch, Kornelius, Pippel, Eckhard, Hesse, Dietrich, Zacharias, Margit and Go?sele, Ulrich

Published: 2006

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Author(s): Besser, P

Published: 2008

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Author(s): Walsh, R B, Howard, S C, Nelson, A and Skinner, W M

Published: 2012

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Author(s): Schie�l, Stefan P, Fr�hlich, Nils, Held, Martin, Gannott, Florentina, Schweiger, Manuel, Forster, Michael, Scherf, Ullrich and Zaumseil, Jana

Published: 2014

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Author(s): Wang, Wei-Cheng, Lin, Che-Wei, Chen, Hsin-Jui, Chang, Che-Wei, Huang, Jhih-Jie, Yang, Ming-Jui, Tjahjono, Budi, Huang, Jian-Jia, Hsu, Wen-Ching and Chen, Miin-Jang

Published: 2013

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Author(s): Tapily, K, Gu, D and Baumgart, H

Published: 2010

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